From chen0622 at snf.stanford.edu  Wed Apr  4 12:18:35 2012
From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu)
Date: Wed, 4 Apr 2012 12:18:35 -0700
Subject: Shutdown sts SNF 2012-04-04 12:18:35: chamber lid problem, Jim is working on it. 
Message-ID: <mailman.1473.1357938615.25857.sts-pcs@snf.stanford.edu>




From jhaydon at snf.stanford.edu  Fri Apr  6 11:42:22 2012
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Fri, 6 Apr 2012 11:42:22 -0700
Subject: Shutdown sts SNF 2012-04-04 12:18:35: chamber lid problem, Jim is working on it. 
Message-ID: <mailman.1474.1357938615.25857.sts-pcs@snf.stanford.edu>

lid is workin now replace leaking connector



From elibol at snf.stanford.edu  Fri Apr  6 13:40:47 2012
From: elibol at snf.stanford.edu (elibol at snf.stanford.edu)
Date: Fri, 6 Apr 2012 13:40:47 -0700
Subject: Comment sts SNF 2012-04-06 13:40:47: Clean Cycle Started
Message-ID: <mailman.1475.1357938615.25857.sts-pcs@snf.stanford.edu>




From jperez at snf.stanford.edu  Mon Apr  9 07:56:50 2012
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Mon, 9 Apr 2012 07:56:50 -0700
Subject: Shutdown sts SNF 2012-04-09 07:56:50: Shut down for 2% silane bottle change
Message-ID: <mailman.1476.1357938615.25857.sts-pcs@snf.stanford.edu>




From jperez at snf.stanford.edu  Tue Apr 10 09:50:52 2012
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Tue, 10 Apr 2012 09:50:52 -0700
Subject: Shutdown sts SNF 2012-04-09 07:56:50: Shut down for 2% silane bottle change
Message-ID: <mailman.1477.1357938615.25857.sts-pcs@snf.stanford.edu>

Bottle change passed leak check.



From jperez at snf.stanford.edu  Tue Apr 10 09:51:07 2012
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Tue, 10 Apr 2012 09:51:07 -0700
Subject: Comment sts SNF 2012-04-06 13:40:47: Clean Cycle Started
Message-ID: <mailman.1478.1357938615.25857.sts-pcs@snf.stanford.edu>

olde clean note



From jperez at snf.stanford.edu  Tue Apr 10 15:21:18 2012
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Tue, 10 Apr 2012 15:21:18 -0700
Subject: Comment sts SNF 2012-04-10 15:21:18: Low Frequency oxide test was good
Message-ID: <mailman.1479.1357938615.25857.sts-pcs@snf.stanford.edu>

359 A / min , 1.47 index of refraction



From jhaydon at snf.stanford.edu  Wed Apr 18 15:27:44 2012
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Wed, 18 Apr 2012 15:27:44 -0700
Subject: Problem sts SNF 2012-04-18 15:27:44: low frequency power supply shut down mid process
Message-ID: <mailman.1480.1357938615.25857.sts-pcs@snf.stanford.edu>

LF power supply has been fixed and restarted etchback3



From jhaydon at snf.stanford.edu  Fri Apr 20 08:29:22 2012
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Fri, 20 Apr 2012 08:29:22 -0700
Subject: Problem sts SNF 2012-04-18 15:27:44: low frequency power supply shut down mid process
Message-ID: <mailman.1481.1357938615.25857.sts-pcs@snf.stanford.edu>

No new problems with the LF power supply



From liangjl at snf.stanford.edu  Mon Apr 23 22:44:32 2012
From: liangjl at snf.stanford.edu (liangjl at snf.stanford.edu)
Date: Mon, 23 Apr 2012 22:44:32 -0700
Subject: Problem sts SNF 2012-04-23 22:44:31: pressure tolerence error
Message-ID: <mailman.1482.1357938615.25857.sts-pcs@snf.stanford.edu>

keep getting pressure tolerence error.