April 2012 Archives by author

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Starting: Wed Apr 4 12:18:35 PDT 2012
Ending: Mon Apr 23 22:44:32 PDT 2012
Messages: 10

• Shutdown sts SNF 2012-04-04 12:18:35: chamber lid problem, Jim is working on it.   chen0622 at snf.stanford.edu
• Comment sts SNF 2012-04-06 13:40:47: Clean Cycle Started   elibol at snf.stanford.edu
• Shutdown sts SNF 2012-04-04 12:18:35: chamber lid problem, Jim is working on it.   jhaydon at snf.stanford.edu
• Problem sts SNF 2012-04-18 15:27:44: low frequency power supply shut down mid process   jhaydon at snf.stanford.edu
• Problem sts SNF 2012-04-18 15:27:44: low frequency power supply shut down mid process   jhaydon at snf.stanford.edu
• Shutdown sts SNF 2012-04-09 07:56:50: Shut down for 2% silane bottle change   jperez at snf.stanford.edu
• Shutdown sts SNF 2012-04-09 07:56:50: Shut down for 2% silane bottle change   jperez at snf.stanford.edu
• Comment sts SNF 2012-04-06 13:40:47: Clean Cycle Started   jperez at snf.stanford.edu
• Comment sts SNF 2012-04-10 15:21:18: Low Frequency oxide test was good   jperez at snf.stanford.edu
• Problem sts SNF 2012-04-23 22:44:31: pressure tolerence error   liangjl at snf.stanford.edu

Last message date: Mon Apr 23 22:44:32 PDT 2012
Archived on: Fri Jan 11 13:10:33 PST 2013

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