From seymour at snf.stanford.edu Fri Feb 17 09:30:37 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 17 Feb 2012 09:30:37 -0800 Subject: Comment sts SNF 2012-02-17 09:30:37: 2% ssilane cylinder changed Message-ID: on leak test From jperez at snf.stanford.edu Tue Feb 21 08:52:10 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 21 Feb 2012 08:52:10 -0800 Subject: Shutdown sts SNF 2012-02-21 08:52:09: no nitrus oxide flow Message-ID: From jperez at snf.stanford.edu Tue Feb 21 15:01:36 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 21 Feb 2012 15:01:36 -0800 Subject: Shutdown sts SNF 2012-02-21 08:52:09: no nitrus oxide flow Message-ID: Turned on, along with ammonia gas From jperez at snf.stanford.edu Tue Feb 21 15:01:55 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 21 Feb 2012 15:01:55 -0800 Subject: Comment sts SNF 2012-02-17 09:30:37: 2% ssilane cylinder changed Message-ID: Running tests From jperez at snf.stanford.edu Tue Feb 21 15:02:33 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 21 Feb 2012 15:02:33 -0800 Subject: Shutdown sts SNF 2011-12-12 08:20:10: READY TO PURGE GASES, Message-ID: Hi freq and Lo freq tests good, From pnataraj at snf.stanford.edu Tue Feb 21 15:36:06 2012 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Tue, 21 Feb 2012 15:36:06 -0800 Subject: Comment sts SNF 2012-02-21 15:36:06: Amonia flow Message-ID: Amonia flow variation for SiNx From jperez at snf.stanford.edu Thu Feb 23 07:07:51 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 23 Feb 2012 07:07:51 -0800 Subject: Problem sts SNF 2012-02-23 07:07:51: NItride test not completed, Ammonia flow spiking Message-ID: When the Ammonia flow spikes we get an error. I will try several things like purge/ pump on the Ammonia line. From jperez at snf.stanford.edu Fri Feb 24 13:36:16 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 24 Feb 2012 13:36:16 -0800 Subject: Problem sts SNF 2012-02-23 07:07:51: NItride test not completed, Ammonia flow spiking Message-ID: I ran a total of five test wafers and Nitride is up. Load four wafers during one pass and here are the average readings Back of Platen wfr avg. 942/A Front of Platen wf avg. 935A Right side of platen wf avg 952A Left side of platen wf avg 934A This was a ten minute deposition, so your dep rate is 93 to 95 A/min. From jperez at snf.stanford.edu Fri Feb 24 13:38:06 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 24 Feb 2012 13:38:06 -0800 Subject: Comment sts SNF 2012-02-21 15:36:06: Amonia flow Message-ID: Ammonia flow has stablized. Did not see any spiking during four different times running the nitride recipe. From jperez at snf.stanford.edu Fri Feb 24 13:39:35 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 24 Feb 2012 13:39:35 -0800 Subject: Comment sts SNF 2012-02-24 13:39:34: Nitride test good dep rate is 93 - 95 A/min Message-ID: From waqasm at snf.stanford.edu Tue Feb 28 10:53:58 2012 From: waqasm at snf.stanford.edu (waqasm at snf.stanford.edu) Date: Tue, 28 Feb 2012 10:53:58 -0800 Subject: Problem sts SNF 2012-02-28 10:53:57: Gas flow error Message-ID: recipe wm-roxhf: got an "Error, Gas flow rate (Nitrous Oxide)" couldnt resume.. had to abort. From jperez at snf.stanford.edu Tue Feb 28 14:36:53 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 28 Feb 2012 14:36:53 -0800 Subject: Problem sts SNF 2012-02-28 14:36:52: Nitrus oxide is not able to stay at set-point Message-ID: If the setpoint is 400, it error never reaching 400sccm. If the setpoint is 300, it errors and never reaching 300 sccm Up for nitride only until the problem is resolved. From jperez at snf.stanford.edu Tue Feb 28 15:14:56 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 28 Feb 2012 15:14:56 -0800 Subject: Problem sts SNF 2012-02-28 14:36:52: Nitrus oxide is not able to stay at set-point Message-ID: This was the SiH4 flow, sorry. The N2O flow is too high, standard recipe flow is 1400 sccm for N2O. Will check if MFC can accomadate the 1800 sccm that you want. From jperez at snf.stanford.edu Tue Feb 28 15:15:54 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 28 Feb 2012 15:15:54 -0800 Subject: Problem sts SNF 2012-02-28 10:53:57: Gas flow error Message-ID: Standard recipes (tried two) are working. Non- standard setpoint may be the problem.