From jperez at snf.stanford.edu Tue Jun 12 09:43:15 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 12 Jun 2012 09:43:15 -0700 Subject: Problem sts SNF 2012-06-12 09:43:15: Ran Nit recipe and 1 step pressure won't drop to set-point Message-ID: Set-point is 500 and pressure sat at 850. Watched for pressure to drop, but wouldn't. From jhaydon at snf.stanford.edu Wed Jun 13 16:07:35 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 13 Jun 2012 16:07:35 -0700 Subject: Shutdown sts SNF 2012-06-13 16:07:35: valve issues Message-ID: From jperez at snf.stanford.edu Fri Jun 22 15:03:00 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 22 Jun 2012 15:03:00 -0700 Subject: Shutdown sts SNF 2012-06-13 16:07:35: valve issues Message-ID: I am releasing STS PECVD. It isn't completely fixed. But if you would like to test and run your samples be aware that that it stil has some issues and has not be qualified. It had to go through clean first before I could test some of the recipes. Please test your process first before committing your samples. Dual frequency nitride still isn't working properly. High Frequency some times doesn't strike a plasma. Jim Haydon ran High Frequency nitride and didn't see a problem for seven minutes. High Frequency oxide was ran for three minutes and didn't see a problem. Low frequency oxide didn't see a problem. From mtang at snf.stanford.edu Sat Jun 23 13:44:23 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sat, 23 Jun 2012 13:44:23 -0700 Subject: Shutdown sts SNF 2012-06-23 13:44:23: Silanes are shut off Message-ID: Due to fire detector problem in the gas cabinet From tberg at snf.stanford.edu Mon Jun 25 13:17:12 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 25 Jun 2012 13:17:12 -0700 Subject: Shutdown sts SNF 2012-06-23 13:44:23: Silanes are shut off Message-ID: silane is back on From jperez at snf.stanford.edu Tue Jun 26 07:09:12 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 26 Jun 2012 07:09:12 -0700 Subject: Problem sts SNF 2012-06-26 07:09:11: High Frequency power supply died!!!!!!!!!!! Message-ID: From jperez at snf.stanford.edu Thu Jun 28 06:58:06 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 28 Jun 2012 06:58:06 -0700 Subject: Problem sts SNF 2012-06-12 09:43:15: Ran Nit recipe and 1 step pressure won't drop to set-point Message-ID: High Frequency being re-built From jhaydon at snf.stanford.edu Thu Jun 28 15:04:15 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 28 Jun 2012 15:04:15 -0700 Subject: Shutdown sts SNF 2012-06-28 15:04:14: low frequency power supply not working Message-ID: