Shutdown sts SNF 2012-06-13 16:07:35: valve issues

jperez at snf.stanford.edu jperez at snf.stanford.edu
Fri Jun 22 15:03:00 PDT 2012


I am releasing STS PECVD. It isn't completely fixed. But if
you would like to test and run your samples be aware that that
it stil has some issues and has not be qualified. It had to go through 
clean first before I could test some of the recipes. Please test your
process first before committing your samples.
Dual frequency nitride still isn't working properly. High Frequency some
times doesn't strike a plasma.
Jim Haydon ran High Frequency nitride and didn't see a problem
for seven minutes.
High Frequency oxide was ran for three minutes and didn't see a 
problem.
Low frequency oxide didn't see a problem.




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