From jasonlin at snf.stanford.edu Wed Mar 7 00:01:11 2012 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Wed, 7 Mar 2012 00:01:11 -0800 Subject: Problem sts SNF 2012-03-07 00:01:10: Cannot Control Pressure Message-ID: The tool cannot control the pressure, and it rises to above 800mT before it gives an error message. To make sure it isn't a recipe issues, I also tried to run O2 Descum recipe, but with the same pressure fault. From jhaydon at snf.stanford.edu Fri Mar 9 06:25:44 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 9 Mar 2012 06:25:44 -0800 Subject: Problem sts SNF 2012-03-07 00:01:10: Cannot Control Pressure Message-ID: could not duplicate problem after several runs From dgunning at snf.stanford.edu Mon Mar 19 03:34:56 2012 From: dgunning at snf.stanford.edu (dgunning at snf.stanford.edu) Date: Mon, 19 Mar 2012 03:34:56 -0700 Subject: Comment sts SNF 2012-03-19 03:34:55: not clean Message-ID: yellow deposit under platen From jperez at snf.stanford.edu Thu Mar 22 11:02:13 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 22 Mar 2012 11:02:13 -0700 Subject: Problem sts SNF 2012-03-22 11:02:13: When running nitride recipe, low freq. power didn't come on Message-ID: From jperez at snf.stanford.edu Thu Mar 22 11:06:59 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 22 Mar 2012 11:06:59 -0700 Subject: Problem sts SNF 2012-03-22 11:02:13: When running nitride recipe, low freq. power didn't come on Message-ID: Jim checked fuses and blew out filter and seems to work now From jperez at snf.stanford.edu Thu Mar 22 14:11:19 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 22 Mar 2012 14:11:19 -0700 Subject: Problem sts SNF 2012-03-22 14:11:18: Low Frequency having a problem Message-ID: We've been seeing a problem with the low-frequcey. whether it's oxide or nitride. Sometimes it seems that it's not turning on or high reflective power and low watts. ( 40 / 0 but getting 10 / 7watts). High Frequency OK to run. From jperez at snf.stanford.edu Thu Mar 22 15:15:36 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 22 Mar 2012 15:15:36 -0700 Subject: Problem sts SNF 2012-03-22 14:11:18: Low Frequency having a problem Message-ID: Most likely a bad connection. May be intermittent, run test before committing your sample. Ran three cycles and all three low frequency cycles worked without seeing any problem with the power or reflected power (40 / 1). From jperez at snf.stanford.edu Thu Mar 22 15:16:48 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 22 Mar 2012 15:16:48 -0700 Subject: Comment sts SNF 2012-03-19 03:34:55: not clean Message-ID: Will check next clean, Jim blew out the filter. From jperez at snf.stanford.edu Thu Mar 22 15:24:57 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 22 Mar 2012 15:24:57 -0700 Subject: Comment sts SNF 2012-02-24 13:39:34: Nitride test good dep rate is 93 - 95 A/min Message-ID: new comment for low frequency and wouldn't want someone to get confused with this statement. From jperez at snf.stanford.edu Thu Mar 22 15:27:24 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 22 Mar 2012 15:27:24 -0700 Subject: Comment sts SNF 2012-03-22 15:27:24: Run test before committing your sample with low frequency recipes Message-ID: Low frequency may have an intermittent problem (low wattage and high reflective power). From chen0622 at snf.stanford.edu Fri Mar 23 11:53:42 2012 From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu) Date: Fri, 23 Mar 2012 11:53:42 -0700 Subject: Problem sts SNF 2012-03-23 11:53:42: no power on low frequency Message-ID: To run the oxpredep for clean cycle, no power and plasma shown. "RF 2 power tolerence error" message kept coming up. From jperez at snf.stanford.edu Fri Mar 23 12:48:40 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 23 Mar 2012 12:48:40 -0700 Subject: Shutdown sts SNF 2012-03-23 12:48:40: Power supply lites up, Message-ID: but must of triggered some interlock because it won't turn on the source guns. From jperez at snf.stanford.edu Fri Mar 23 13:19:05 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 23 Mar 2012 13:19:05 -0700 Subject: Shutdown sts SNF 2012-03-23 12:48:40: Power supply lites up, Message-ID: Wrong machine, meant to put Metalica down. From jperez at snf.stanford.edu Fri Mar 23 13:20:54 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 23 Mar 2012 13:20:54 -0700 Subject: Problem sts SNF 2012-03-23 13:20:54: ONLY UP FOR HIGH FREQUENCY Message-ID: From clee58 at snf.stanford.edu Sat Mar 24 15:12:42 2012 From: clee58 at snf.stanford.edu (clee58 at snf.stanford.edu) Date: Sat, 24 Mar 2012 15:12:42 -0700 Subject: Shutdown sts SNF 2012-03-24 15:12:41: System error: "Purge gas flow error" Message-ID: System error: "Purge Gas Flow Error" Two wafers are inside the chamber yet. I put two wafer boxes on the desk in front of STS. Please save the wafers in the boxes. Thank you. From maurice at snf.stanford.edu Sat Mar 24 18:01:16 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sat, 24 Mar 2012 18:01:16 -0700 Subject: Shutdown sts SNF 2012-03-24 15:12:41: System error: "Purge gas flow error" Message-ID: Predeep will recover wafer From maurice at snf.stanford.edu Sat Mar 24 18:01:40 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sat, 24 Mar 2012 18:01:40 -0700 Subject: Problem sts SNF 2012-03-24 18:01:40: Purge Gas Flow Error Message-ID: System error: "Purge Gas Flow Error" Two wafers are inside the chamber yet. I put two wafer boxes on the desk in front of STS. Please save the wafers in the boxes. Thank you. From pnataraj at snf.stanford.edu Sun Mar 25 16:10:08 2012 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Sun, 25 Mar 2012 16:10:08 -0700 Subject: Shutdown sts SNF 2012-03-25 16:10:08: many things going on Message-ID: I will speak to Jim in the morning. It is not safe to use now. From jperez at snf.stanford.edu Mon Mar 26 07:09:54 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 26 Mar 2012 07:09:54 -0700 Subject: Problem sts SNF 2012-03-23 13:20:54: ONLY UP FOR HIGH FREQUENCY Message-ID: From jperez at snf.stanford.edu Thu Mar 29 15:01:28 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 29 Mar 2012 15:01:28 -0700 Subject: Shutdown sts SNF 2012-03-25 16:10:08: many things going on Message-ID: I ran about 8 recipes today and didn't have any errors, didn't have low or high frequency issues.Read oxide test wfrs on Rudolph ellipsometer because woollam wasn't moding. From jperez at snf.stanford.edu Thu Mar 29 15:02:41 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 29 Mar 2012 15:02:41 -0700 Subject: Problem sts SNF 2012-03-24 18:01:40: Purge Gas Flow Error Message-ID: Ran 8 recipes today without any errors after Jim worked on contacts. Users should keep an eye on all parameters. From jperez at snf.stanford.edu Thu Mar 29 15:03:16 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 29 Mar 2012 15:03:16 -0700 Subject: Problem sts SNF 2012-03-23 11:53:42: no power on low frequency Message-ID: After running 8 recipes low and high frequency working well. From jperez at snf.stanford.edu Thu Mar 29 15:12:48 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 29 Mar 2012 15:12:48 -0700 Subject: Problem sts SNF 2012-03-29 15:12:47: Right after recipe finished I got an ERROR Message-ID: PURGE GAS FAULT ERROR FOUR TIMES WITH THE AMMONIA GAS. WILL LET PNATARAJ RUN TONIGHT AND HAVE HIM SHUT DOWN WHEN DONE,. From jperez at snf.stanford.edu Thu Mar 29 15:25:02 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 29 Mar 2012 15:25:02 -0700 Subject: Comment sts SNF 2012-03-29 15:25:01: UP FOR OXIDES ONLY! Message-ID: