From faridz at snf.stanford.edu Wed May 2 10:40:42 2012 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Wed, 2 May 2012 10:40:42 -0700 Subject: Problem sts SNF 2012-05-02 10:40:41: unable to close lid, PC stuck Message-ID: From jhaydon at snf.stanford.edu Thu May 3 07:04:40 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 3 May 2012 07:04:40 -0700 Subject: Problem sts SNF 2012-05-02 10:40:41: unable to close lid, PC stuck Message-ID: reset computer From waqasm at snf.stanford.edu Thu May 3 10:45:13 2012 From: waqasm at snf.stanford.edu (waqasm at snf.stanford.edu) Date: Thu, 3 May 2012 10:45:13 -0700 Subject: Problem sts SNF 2012-05-03 10:45:12: Load/tune off - high reflected power Message-ID: HF oxide dep: load tune during dep became 0% and 100%. 36 watt incident and 52 watt reflected power and no pink plasma generated. From jhaydon at snf.stanford.edu Thu May 17 07:25:09 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 17 May 2012 07:25:09 -0700 Subject: Shutdown sts SNF 2012-05-17 07:25:08: Silane bottle change (24 hrs) Message-ID: From jhaydon at snf.stanford.edu Fri May 18 06:16:01 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 18 May 2012 06:16:01 -0700 Subject: Shutdown sts SNF 2012-05-17 07:25:08: Silane bottle change (24 hrs) Message-ID: Silane leack check passed From jperez at snf.stanford.edu Fri May 18 14:25:38 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 18 May 2012 14:25:38 -0700 Subject: Comment sts SNF 2012-05-18 14:25:37: Good test for Low Frequency Oxide after 2% bottle change. Message-ID: dep rate for LF OX 396A/min., Index 1.47 From popomoo at snf.stanford.edu Sat May 19 12:04:25 2012 From: popomoo at snf.stanford.edu (popomoo at snf.stanford.edu) Date: Sat, 19 May 2012 12:04:25 -0700 Subject: Problem sts SNF 2012-05-19 12:04:25: npredep - 'Pressure Tolerance Error' Message-ID: I could not go to the next step after 'Warmup', because it kept having the same error 'Pressure Tolerance Error'. From jperez at snf.stanford.edu Mon May 21 07:22:09 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 21 May 2012 07:22:09 -0700 Subject: Problem sts SNF 2012-05-19 12:04:25: npredep - 'Pressure Tolerance Error' Message-ID: Ran several runs with no tolerance errors. From janp at snf.stanford.edu Mon May 21 19:03:11 2012 From: janp at snf.stanford.edu (janp at snf.stanford.edu) Date: Mon, 21 May 2012 19:03:11 -0700 Subject: Problem sts SNF 2012-05-21 19:03:11: No silane flow Message-ID: Also got pressure errors and high reflected power (low RF) on O2descum. From suyog at snf.stanford.edu Mon May 21 20:22:39 2012 From: suyog at snf.stanford.edu (suyog at snf.stanford.edu) Date: Mon, 21 May 2012 20:22:39 -0700 Subject: Problem sts SNF 2012-05-21 20:22:38: Gas flow error Message-ID: Silane gas flow error - can't deposit! From jhaydon at snf.stanford.edu Tue May 22 07:11:08 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 22 May 2012 07:11:08 -0700 Subject: Problem sts SNF 2012-05-21 20:22:38: Gas flow error Message-ID: Silane was shut down in the bunker. It has been reset is is working now but NH3 is not resetting at this time. From jhaydon at snf.stanford.edu Tue May 22 07:12:13 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 22 May 2012 07:12:13 -0700 Subject: Problem sts SNF 2012-05-21 19:03:11: No silane flow Message-ID: Silane had shut off in the bunker it has been reset and is working now. From jhaydon at snf.stanford.edu Tue May 22 07:13:04 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 22 May 2012 07:13:04 -0700 Subject: Problem sts SNF 2012-05-22 07:13:03: NH3 is not working not able to reset Message-ID: From pnataraj at snf.stanford.edu Tue May 22 15:54:45 2012 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Tue, 22 May 2012 15:54:45 -0700 Subject: Problem sts SNF 2012-05-22 15:54:44: warm up pressure problem Message-ID: From hongyuc at snf.stanford.edu Tue May 22 16:26:48 2012 From: hongyuc at snf.stanford.edu (hongyuc at snf.stanford.edu) Date: Tue, 22 May 2012 16:26:48 -0700 Subject: Problem sts SNF 2012-05-22 16:26:47: silane is not working... gas error Message-ID: From cbaxter at snf.stanford.edu Tue May 22 17:58:50 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 22 May 2012 17:58:50 -0700 Subject: Shutdown sts SNF 2012-05-22 17:58:49: Silane problem Message-ID: Silane nupro valve does not and also stand by purge valve not working, will continue to troubleshoot.... From jperez at snf.stanford.edu Thu May 31 14:36:31 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 31 May 2012 14:36:31 -0700 Subject: Problem sts SNF 2012-05-22 16:26:47: silane is not working... gas error Message-ID: There was a problem at the bottles on this day From jperez at snf.stanford.edu Thu May 31 14:40:40 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 31 May 2012 14:40:40 -0700 Subject: Problem sts SNF 2012-05-22 15:54:44: warm up pressure problem Message-ID: Nitrogen MFC is very sensitive and shouln't be touched. From jperez at snf.stanford.edu Thu May 31 14:41:22 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 31 May 2012 14:41:22 -0700 Subject: Problem sts SNF 2012-05-22 07:13:03: NH3 is not working not able to reset Message-ID: The NH3 is now working. From jperez at snf.stanford.edu Thu May 31 14:42:57 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 31 May 2012 14:42:57 -0700 Subject: Comment sts SNF 2012-05-18 14:25:37: Good test for Low Frequency Oxide after 2% bottle change. Message-ID: Retested after maintenance work on system. Low Frequency oxide test was good with a deposition rate of 393A/min. From jperez at snf.stanford.edu Thu May 31 14:47:30 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 31 May 2012 14:47:30 -0700 Subject: Problem sts SNF 2012-05-03 10:45:12: Load/tune off - high reflected power Message-ID: This could happen again, since most of the problems lately have been intermittent. I ran High Frequency nitride several times today with little problems. The high frequency nitride dep rate is 99A /min. From jperez at snf.stanford.edu Thu May 31 14:50:01 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 31 May 2012 14:50:01 -0700 Subject: Problem sts SNF 2012-04-23 22:44:31: pressure tolerence error Message-ID: Usually this ocuurs when the argon toggle was left on or just wait and give the pressure time to adjust. Ran eight recipes today and didn't see any pressure tolerence. From jperez at snf.stanford.edu Thu May 31 14:53:01 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 31 May 2012 14:53:01 -0700 Subject: Comment sts SNF 2012-04-10 15:21:18: Low Frequency oxide test was good Message-ID: Retested Low Frequency oxide today and had good results with index of refraction 1.476 and dep rate 393A/min From jperez at snf.stanford.edu Thu May 31 14:54:50 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 31 May 2012 14:54:50 -0700 Subject: Problem sts SNF 2012-03-29 15:12:47: Right after recipe finished I got an ERROR Message-ID: Jim changed out the MFC and haven't seen this error in awhile. From jperez at snf.stanford.edu Thu May 31 15:06:01 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 31 May 2012 15:06:01 -0700 Subject: Comment sts SNF 2012-03-22 15:27:24: Run test before committing your sample with low frequency recipes Message-ID: Jim is still working on the issues with STS and Low Freequecy has settled down.. Today's recipe ran fine. with good oxide results From jperez at snf.stanford.edu Thu May 31 15:07:07 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 31 May 2012 15:07:07 -0700 Subject: Comment sts SNF 2012-03-29 15:25:01: UP FOR OXIDES ONLY! Message-ID: up for low frequency oxide and high frequency nitride, but not up for dual frequency nitrides. From jperez at snf.stanford.edu Thu May 31 15:07:56 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 31 May 2012 15:07:56 -0700 Subject: Comment sts SNF 2010-12-06 07:02:08: Teied new Ptherm exhausts to burn box Message-ID: Clearing message from first of the year. From jperez at snf.stanford.edu Thu May 31 15:08:58 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 31 May 2012 15:08:58 -0700 Subject: Shutdown sts SNF 2012-05-22 17:58:49: Silane problem Message-ID: Back up for Low Frequency oxides and high frequency nitrides. From jperez at snf.stanford.edu Thu May 31 15:09:47 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 31 May 2012 15:09:47 -0700 Subject: Problem sts SNF 2012-05-31 15:09:46: Dual Frequency nitride still isn't working Message-ID: From jperez at snf.stanford.edu Thu May 31 15:12:00 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 31 May 2012 15:12:00 -0700 Subject: Comment sts SNF 2012-05-31 15:11:59: High Frequency nitride test good 99A/min Message-ID: Index 2.06 From jperez at snf.stanford.edu Thu May 31 15:13:33 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 31 May 2012 15:13:33 -0700 Subject: Comment sts SNF 2012-05-31 15:13:32: Low Frequency Oxide test was good Message-ID: Dep. rate was 393A/min and index was 1.47