Problem sts SNF 2012-05-03 10:45:12: Load/tune off - high reflected power

waqasm at snf.stanford.edu waqasm at snf.stanford.edu
Thu May 3 10:45:13 PDT 2012


HF oxide dep: load tune during dep became 0% and 100%. 36 watt incident and 52 watt reflected power and no pink plasma generated.




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