Problem sts SNF 2012-05-21 20:22:38: Gas flow error
suyog at snf.stanford.edu
suyog at snf.stanford.edu
Mon May 21 20:22:39 PDT 2012
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Problem sts SNF 2012-05-21 19:03:11: No silane flow
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Problem sts SNF 2012-05-21 20:22:38: Gas flow error
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Silane gas flow error - can't deposit!
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Problem sts SNF 2012-05-21 19:03:11: No silane flow
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Problem sts SNF 2012-05-21 20:22:38: Gas flow error
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