Comment sts SNF 2012-05-18 14:25:37: Good test for Low Frequency Oxide after 2% bottle change.

jperez at snf.stanford.edu jperez at snf.stanford.edu
Thu May 31 14:42:57 PDT 2012


Retested after maintenance work on system. Low Frequency oxide test
was good with a deposition rate of 393A/min.




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