Problem sts SNF 2012-05-03 10:45:12: Load/tune off - high reflected power

jperez at snf.stanford.edu jperez at snf.stanford.edu
Thu May 31 14:47:30 PDT 2012


This could happen again, since most of the problems lately have
been intermittent. I ran High Frequency nitride several times today
with little problems. The high frequency nitride dep rate is 99A /min.




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