Comment sts SNF 2012-05-31 15:13:32: Low Frequency Oxide test was good
jperez at snf.stanford.edu
jperez at snf.stanford.edu
Thu May 31 15:13:33 PDT 2012
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Comment sts SNF 2012-05-31 15:11:59: High Frequency nitride test good 99A/min
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Dep. rate was 393A/min and index was 1.47
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Comment sts SNF 2012-05-31 15:11:59: High Frequency nitride test good 99A/min
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