May 2012 Archives by date

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Starting: Wed May 2 10:40:42 PDT 2012
Ending: Thu May 31 15:13:33 PDT 2012
Messages: 31

• Problem sts SNF 2012-05-02 10:40:41: unable to close lid, PC stuck   faridz at snf.stanford.edu
• Problem sts SNF 2012-05-02 10:40:41: unable to close lid, PC stuck   jhaydon at snf.stanford.edu
• Problem sts SNF 2012-05-03 10:45:12: Load/tune off - high reflected power   waqasm at snf.stanford.edu
• Shutdown sts SNF 2012-05-17 07:25:08: Silane bottle change (24 hrs)   jhaydon at snf.stanford.edu
• Shutdown sts SNF 2012-05-17 07:25:08: Silane bottle change (24 hrs)   jhaydon at snf.stanford.edu
• Comment sts SNF 2012-05-18 14:25:37: Good test for Low Frequency Oxide after 2% bottle change.   jperez at snf.stanford.edu
• Problem sts SNF 2012-05-19 12:04:25: npredep - 'Pressure Tolerance Error'   popomoo at snf.stanford.edu
• Problem sts SNF 2012-05-19 12:04:25: npredep - 'Pressure Tolerance Error'   jperez at snf.stanford.edu
• Problem sts SNF 2012-05-21 19:03:11: No silane flow   janp at snf.stanford.edu
• Problem sts SNF 2012-05-21 20:22:38: Gas flow error   suyog at snf.stanford.edu
• Problem sts SNF 2012-05-21 20:22:38: Gas flow error   jhaydon at snf.stanford.edu
• Problem sts SNF 2012-05-21 19:03:11: No silane flow   jhaydon at snf.stanford.edu
• Problem sts SNF 2012-05-22 07:13:03: NH3 is not working not able to reset   jhaydon at snf.stanford.edu
• Problem sts SNF 2012-05-22 15:54:44: warm up pressure problem   pnataraj at snf.stanford.edu
• Problem sts SNF 2012-05-22 16:26:47: silane is not working... gas error   hongyuc at snf.stanford.edu
• Shutdown sts SNF 2012-05-22 17:58:49: Silane problem   cbaxter at snf.stanford.edu
• Problem sts SNF 2012-05-22 16:26:47: silane is not working... gas error   jperez at snf.stanford.edu
• Problem sts SNF 2012-05-22 15:54:44: warm up pressure problem   jperez at snf.stanford.edu
• Problem sts SNF 2012-05-22 07:13:03: NH3 is not working not able to reset   jperez at snf.stanford.edu
• Comment sts SNF 2012-05-18 14:25:37: Good test for Low Frequency Oxide after 2% bottle change.   jperez at snf.stanford.edu
• Problem sts SNF 2012-05-03 10:45:12: Load/tune off - high reflected power   jperez at snf.stanford.edu
• Problem sts SNF 2012-04-23 22:44:31: pressure tolerence error   jperez at snf.stanford.edu
• Comment sts SNF 2012-04-10 15:21:18: Low Frequency oxide test was good   jperez at snf.stanford.edu
• Problem sts SNF 2012-03-29 15:12:47: Right after recipe finished I got an ERROR   jperez at snf.stanford.edu
• Comment sts SNF 2012-03-22 15:27:24: Run test before committing your sample with low frequency recipes   jperez at snf.stanford.edu
• Comment sts SNF 2012-03-29 15:25:01: UP FOR OXIDES ONLY!   jperez at snf.stanford.edu
• Comment sts SNF 2010-12-06 07:02:08: Teied new Ptherm exhausts to burn box   jperez at snf.stanford.edu
• Shutdown sts SNF 2012-05-22 17:58:49: Silane problem   jperez at snf.stanford.edu
• Problem sts SNF 2012-05-31 15:09:46: Dual Frequency nitride still isn't working   jperez at snf.stanford.edu
• Comment sts SNF 2012-05-31 15:11:59: High Frequency nitride test good 99A/min   jperez at snf.stanford.edu
• Comment sts SNF 2012-05-31 15:13:32: Low Frequency Oxide test was good   jperez at snf.stanford.edu

Last message date: Thu May 31 15:13:33 PDT 2012
Archived on: Fri Jan 11 13:10:33 PST 2013

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