From miller at snf.stanford.edu Fri Jan 11 13:10:03 2013 From: miller at snf.stanford.edu (miller at snf.stanford.edu) Date: Apr 17, 2000 Subject: Problem sts: computer monitor dead Message-ID: The monitor appears to be dead. Little green power light remains dark, and there's no picture. It's like a main fuse has blown. Yes, it's plugged in. From gaul at snf.stanford.edu Fri Jan 11 13:10:03 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Apr 20, 2000 Subject: Problem Clear sts: Replaced Monitor Message-ID: From wheeler at snf.stanford.edu Fri Jan 11 13:10:03 2013 From: wheeler at snf.stanford.edu (wheeler at snf.stanford.edu) Date: May 3, 2000 Subject: Shutdown sts: Shutdown to change gas cylinder Message-ID: 2% silane change From wheeler at snf.stanford.edu Fri Jan 11 13:10:03 2013 From: wheeler at snf.stanford.edu (wheeler at snf.stanford.edu) Date: May 4, 2000 Subject: Shutdown Clear sts: 2% Silane & Ammonia gas cylinder change Message-ID: The subject gas cylinders were changed. All is once again right with the world. From mramsey at snf.stanford.edu Fri Jan 11 13:10:03 2013 From: mramsey at snf.stanford.edu (mramsey at snf.stanford.edu) Date: Jun 12, 2000 Subject: Problem sts: motorgaurd filter on rough pump is not working Message-ID: From wheeler at snf.stanford.edu Fri Jan 11 13:10:03 2013 From: wheeler at snf.stanford.edu (wheeler at snf.stanford.edu) Date: Jul 18, 2000 Subject: Shutdown sts: Silane gas cylinder change Message-ID: From wheeler at snf.stanford.edu Fri Jan 11 13:10:03 2013 From: wheeler at snf.stanford.edu (wheeler at snf.stanford.edu) Date: Jul 19, 2000 Subject: Shutdown Clear sts: Silane cylinder changed successfully Message-ID: From mramsey at snf.stanford.edu Fri Jan 11 13:10:03 2013 From: mramsey at snf.stanford.edu (mramsey at snf.stanford.edu) Date: Aug 29, 2000 Subject: Problem Clear sts: replace Motorgaurd system Message-ID: From king at snf.stanford.edu Fri Jan 11 13:10:03 2013 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Sep 21, 2000 Subject: Problem sts: hoist solenoid broken Message-ID: Can't raise the lid without manually blocking the solenoid. From seymour at snf.stanford.edu Fri Jan 11 13:10:03 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sep 25, 2000 Subject: Shutdown sts: silane bottle empty change 9/26 am Message-ID: From gaul at snf.stanford.edu Fri Jan 11 13:10:03 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Sep 27, 2000 Subject: Shutdown Clear sts: bottle change completed Message-ID: From sigari at snf.stanford.edu Fri Jan 11 13:10:03 2013 From: sigari at snf.stanford.edu (sigari at snf.stanford.edu) Date: Sep 27, 2000 Subject: Shutdown sts: Message-ID: Pump oil very low level. Pump oil needs to be recycled. From sigari at snf.stanford.edu Fri Jan 11 13:10:03 2013 From: sigari at snf.stanford.edu (sigari at snf.stanford.edu) Date: Sep 27, 2000 Subject: Shutdown Clear sts: Message-ID: The oil is changed From booth at snf.stanford.edu Fri Jan 11 13:10:03 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:03 -0000 Subject: Shutdown sts: Swap Oil OutDate: Nov 17, 2000 12:43:35 PM Message-ID: Rebuilt pumps installed & working. Will continue to check for oil leaks. From mdickey at snf.stanford.edu Fri Jan 11 13:10:03 2013 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:03 -0000 Subject: Problem sts SNF 2012-08-20 08:31:10: ammonia Message-ID: <15449469.22.1345476671220.JavaMail.coral@shine> No ammonia available at this time From jhaydon at snf.stanford.edu Fri Jan 11 13:10:03 2013 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:03 -0000 Subject: Comment sts SNF 2012-08-30 07:56:01: replacement low frequency supply has been ordered Message-ID: <6586626.110.1346338561533.JavaMail.coral@shine> From jhaydon at snf.stanford.edu Fri Jan 11 13:10:03 2013 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:03 -0000 Subject: Comment sts SNF 2012-09-05 08:51:50: Power supply has arrived and will be installed next week Message-ID: <19671724.31.1346860311193.JavaMail.coral@shine> We will continue trouble shooting RFproblems after Jim M gets back form vacation. From jhaydon at snf.stanford.edu Fri Jan 11 13:10:03 2013 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:03 -0000 Subject: Comment sts SNF 2012-10-03 07:49:44: work continues progress is being made Message-ID: <33341132.26.1349275784998.JavaMail.coral@shine> I am hoping sometime next week . Both power supplies are working but mixed frequency and some interlocks are not. From mdickey at snf.stanford.edu Fri Jan 11 13:10:03 2013 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:03 -0000 Subject: Comment sts SNF 2012-11-13 08:46:16: CF4 Message-ID: <13809944.1.1352825176665.JavaMail.coral@shine> Out of CF4. Replacement has been ordered From mdickey at snf.stanford.edu Fri Jan 11 13:10:03 2013 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:03 -0000 Subject: Comment sts SNF 2012-11-13 10:03:18: CF4 Message-ID: <9649338.9.1352829798914.JavaMail.coral@shine> Gas to be delivered thursday at the latest From jhaydon at snf.stanford.edu Fri Jan 11 13:10:03 2013 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:03 -0000 Subject: Shutdown sts SNF 2012-07-05 11:44:11: Need both frequencies to complete 7 step clean. Message-ID: <9144509.10.1353511063206.JavaMail.coral@shine> STS is ok to use in high frequency only. Low frequency still not working correctly. From waqasm at snf.stanford.edu Fri Jan 11 13:10:03 2013 From: waqasm at snf.stanford.edu (waqasm at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:03 -0000 Subject: Comment sts SNF 2012-11-28 19:42:53: RF power Message-ID: <1597668.9.1354160573754.JavaMail.coral@shine> RF power error during etchback From jperez at snf.stanford.edu Fri Jan 11 13:10:03 2013 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:03 -0000 Subject: Comment sts SNF 2012-11-28 19:42:53: RF power Message-ID: <14084024.27.1354204801093.JavaMail.coral@shine> The wrong recipe was used. STS PECVD is down for low frequency. The substitute recipe for clean is written in the log book. "hifrqcln". Please read you emails with the recipes to use. From jperez at snf.stanford.edu Fri Jan 11 13:10:03 2013 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:03 -0000 Subject: Comment sts SNF 2012-08-30 07:56:01: replacement low frequency supply has been ordered Message-ID: <26532309.28.1354204897013.JavaMail.coral@shine> Low Frequency Isn't working From jperez at snf.stanford.edu Fri Jan 11 13:10:03 2013 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:03 -0000 Subject: Problem sts SNF 2012-08-20 08:31:10: ammonia Message-ID: <19866742.29.1354204929341.JavaMail.coral@shine> OK now From jperez at snf.stanford.edu Fri Jan 11 13:10:03 2013 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:03 -0000 Subject: Comment sts SNF 2012-11-13 08:46:16: CF4 Message-ID: <5491039.30.1354204955609.JavaMail.coral@shine> installed, OK to use From jperez at snf.stanford.edu Fri Jan 11 13:10:03 2013 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:03 -0000 Subject: Comment sts SNF 2012-11-13 10:03:18: CF4 Message-ID: <12927184.31.1354204975817.JavaMail.coral@shine> In house, OK to use. From jperez at snf.stanford.edu Fri Jan 11 13:10:03 2013 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:03 -0000 Subject: Problem sts SNF 2012-11-29 08:07:18: Only High Frequency is UP! Message-ID: <15845620.32.1354205239389.JavaMail.coral@shine> Here are the recipes to use or copy from. hifrqcln= etch back hfoxcoat= 1 micron coat hfnicoat= 2500 coat std_hfox std_hfni DO NOT USE LOW FREQUENCY! From calarrudo at snf.stanford.edu Fri Jan 11 13:10:03 2013 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:03 -0000 Subject: Comment sts SNF 2012-11-30 18:53:46: Particles Message-ID: <22375265.23.1354330426541.JavaMail.coral@shine> I finished the clean cycle before running my test wafers in the STS. There were a lot of particles on my to runs of test wafers. you may want to do another clean before processing good wafers. From jperez at snf.stanford.edu Fri Jan 11 13:10:03 2013 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:03 -0000 Subject: Comment sts SNF 2012-11-30 18:53:46: Particles Message-ID: <8441753.13.1355155638915.JavaMail.coral@shine> Ran test and saw no additional particles. From mdickey at snf.stanford.edu Fri Jan 11 13:10:03 2013 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:03 -0000 Subject: Shutdown sts SNF 2012-12-14 10:03:43: gaas Message-ID: <20383017.17.1355508223740.JavaMail.coral@shine> Down for gas bottle change