Comment sts SNF 2012-11-28 19:42:53: RF power
waqasm at snf.stanford.edu
waqasm at snf.stanford.edu
Fri Jan 11 13:10:03 PST 2013
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Shutdown sts SNF 2012-07-05 11:44:11: Need both frequencies to complete 7 step clean.
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Comment sts SNF 2012-11-28 19:42:53: RF power
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RF power error during etchback
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Shutdown sts SNF 2012-07-05 11:44:11: Need both frequencies to complete 7 step clean.
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Comment sts SNF 2012-11-28 19:42:53: RF power
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