Comment sts SNF 2012-11-28 19:42:53: RF power

jperez at snf.stanford.edu jperez at snf.stanford.edu
Fri Jan 11 13:10:03 PST 2013


The wrong recipe was used. STS PECVD is down for low frequency.
The substitute recipe for clean is written in the log book. "hifrqcln".
Please read you emails with the recipes to use.



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