From flannery at leland.Stanford.EDU  Wed Nov  1 08:48:14 2000
From: flannery at leland.Stanford.EDU (Anthony Flannery)
Date: Wed, 01 Nov 2000 08:48:14 -0800
Subject: Carbide switchover
Message-ID: <3A00494E.EC5EFC09@leland.stanford.edu>

Ho all,

I'd like to switch over to carbide this Friday.  Once I do this, the
chamber will be unavailable for nitride until I switch back.  The
current projection is to have the chamber switched back and clean by
Thursday.  

If this presents a problem for anyone, let me know.

Tony Flannery


From booth at snf.stanford.edu  Thu Nov  2 14:49:28 2000
From: booth at snf.stanford.edu (Len Booth)
Date: Thu, 02 Nov 2000 14:49:28 -0800
Subject: STS dep system down
Message-ID: <3A01EF78.6E36849E@snf.stanford.edu>

STS users -
	We had to shut down the vane pump in
the basement because the oil inside had turned
to goo.  Ray is removing the pump now, FMG will
pick it up tomorrow, and try to analyze what
the problem is.  You can expect several working
days at least, before the system will be
ready to run again.	Len


From flannery at leland.Stanford.EDU  Fri Nov 17 13:47:48 2000
From: flannery at leland.Stanford.EDU (Anthony Flannery)
Date: Fri, 17 Nov 2000 13:47:48 -0800
Subject: STS Status and Carbide Switchover
Message-ID: <3A15A784.B6F6D1A2@leland.stanford.edu>

Hi Gang,

Thanks to Len, Chris, and Ray, the STS is back up.  From what Len tells
me, we had problems with both the blower and the pump.  CHris has done a
calibration run.  According to him, the films are o.k., but the pump
speed seems slightly slower.  This should only be a problem if you are
running a special high flow process.  For the standard recipes, it's
just fine.  As always, if you are doing an ultra-sensitive run for
stress or refractive index, calibration runs are a must.

I am still planning on switching over to carbide, but I know there are a
whole gaggle of you out there who need to get some runs done.  Now's the
time.  I'll plan on switching over late in the day on Monday.  If you
need it longer than that, let me know and I'll hold off.

Tony Flannery