From booth at snf.stanford.edu Mon Oct 16 16:56:48 2000 From: booth at snf.stanford.edu (Len Booth) Date: Mon, 16 Oct 2000 16:56:48 -0700 Subject: STS is down Message-ID: <39EB95C0.89C1029A@snf.stanford.edu> STS users - The STS deposition tool has a bad pump. I've just shut it down, and the pump will be removed for repair tomorrow morning. We expect to have the pump back ready for re-installation into the STS dep tool on Friday. Len From lnjiang at stanford.edu Fri Oct 27 23:48:09 2000 From: lnjiang at stanford.edu (Linan Jiang) Date: Fri, 27 Oct 2000 23:48:09 -0700 (PDT) Subject: STS res. removal In-Reply-To: Message-ID: Finished tonight. Won't use my STS res. time on Saturday (10:00am-3:00pm) and Sunday (8:00pm-). Linan =====