STS is down

Len Booth booth at
Mon Oct 16 16:56:48 PDT 2000

STS users -
	The STS deposition tool has a bad pump.
I've just shut it down, and the pump will be
removed for repair tomorrow morning.  We expect to
have the pump back ready for re-installation into
the STS dep tool on Friday.

More information about the sts mailing list