From seymour at snf.stanford.edu  Mon Nov 12 14:16:23 2001
From: seymour at snf.stanford.edu (Ray Seymour)
Date: Mon, 12 Nov 2001 14:16:23 -0800
Subject: Silane/N2 cylinder change. 
Message-ID: <3BF04A37.40363ED5@snf.stanford.edu>

The silane cylinder is getting low. the new bottle will be in on Friday
16. I will change the cylinder at that time and run the leak check over
the weekend. The tool should be up on Monday morning.
Ray
47425



From mcvittie at stanford.edu  Mon Nov 12 18:25:03 2001
From: mcvittie at stanford.edu (Jim McVittie)
Date: Mon, 12 Nov 2001 18:25:03 -0800
Subject: Optical Properities of STS Oxide
Message-ID: <3BF0847F.BE82793E@stanford.edu>

STS Dep users,

Have any of you looked at the optical properities of the oxide deposited
in this tool?

    Thanks,  Jim McVittie




From seymour at snf.stanford.edu  Fri Nov 16 15:10:33 2001
From: seymour at snf.stanford.edu (Ray Seymour)
Date: Fri, 16 Nov 2001 15:10:33 -0800
Subject: silane cylinder change
Message-ID: <3BF59CE9.DB1DA634@snf.stanford.edu>

The silane/N2 cylinder has been changed. The cylinder is under leak
check and will be released on mondat morning if all is well.
Ray



From jperez at snf.stanford.edu  Mon Nov 26 16:23:05 2001
From: jperez at snf.stanford.edu (Jeannie Perez)
Date: Mon, 26 Nov 2001 16:23:05 -0800
Subject: Equipment Signs
Message-ID: <3C02DCE9.5C13A28B@snf.stanford.edu>

Hello Everyone,

This is to notify the users for STS PECVD and the Innotec Evaporator
that these two pieces of equipment have signs attached to them. Which
reads on one side in white letters "EMPTY" and on the other side in
Yellow letters "IN USE".  Please start using them as part of the
processing procedure.

Regards,
Jeannie