jperez at snf.stanford.edu
Mon Apr 8 16:29:48 PDT 2002
This is to inform you that the STS PECVD is in great need of a major PM.
Until this happens, you may use STS at your own risk. The deposition
rate has dropped and the refracted index is reading between 1.52 - 1.56.
Chris Storment was able to finally clean the system well enough to use
it, but he's afraid that there will be problems for the general user
with the system in it's current state.
I am told that the major PM would take approximately three days (if all
goes well), but the system would have to be ran for a week or so, to get
repeatable good results.
More information about the sts