thin insulating SiN films

Yves Acremann acremann at SLAC.Stanford.EDU
Mon Dec 2 16:44:15 PST 2002


We need to make thin insulating layers of SiN on GaAs ? AlPt. What is 
the minimal thickness at which
the SiN film (made with STS) is reliabely (no piholes)  insulating? Are 
10nm realistic / can we go thinner?


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