STS Gas bottle change completed

Jeannie Perez jperez at snf.stanford.edu
Fri Dec 13 13:56:46 PST 2002


Greeting Users,

The STS is back on line. If you need to use it before Monday morning,
you'll need to test it by running a standard recipe with 2% silane and
98 % nitrogen.

Otherwise I'll be running a qualification test on Monday.
Regards,
Jeannie




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