Uniformity of SiN deposition with STS

Yu-Ju Lin yjlin at stanford.edu
Fri Jan 25 17:42:29 PST 2002

Hi all,

I have a question that would it be OK to put four 4" wafers in STS for SiN
depostion in one run? What is the uniformity between different wafers? My
target thickness is 1um.

Thanks a lot,


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