From eap at gloworm.Stanford.EDU Mon Jul 8 17:19:32 2002 From: eap at gloworm.Stanford.EDU (Eric Perozziello) Date: Mon, 8 Jul 2002 17:19:32 -0700 (PDT) Subject: Purging old recipies from STS PECVD Message-ID: Dear STS Users, We are in the process of purging old recipies from the STS PECVD computer. Since the machine was rebuilt, the recipies have changed, and "standard" nitride and oxide recipies have been created by Jeanie We will not throw away the old recipies- they are archived on the LEFT PC in the CAD room. But it doesn't make sense to keep them on the STS machine since they are no longer valid. Some of you have started making your own new recipies. If you would like to keep those recipies on the STS, please send an email back stating your name and the recipies you would like to have remain on the STS machine. Again, all others have been archived to the left PC in the CAD room. For your information, the new standard recipies and the relevant data (stress, sep rate, refr. index, etc) are listed on laminated cards at the machine. Thank you, Eric P From seymour at snf.stanford.edu Wed Jul 10 07:19:51 2002 From: seymour at snf.stanford.edu (Ray Seymour) Date: Wed, 10 Jul 2002 07:19:51 -0700 Subject: Silane/N2 bottle change. Message-ID: <3D2C4287.A205F077@snf.stanford.edu> The bottle has been changed and is on leak check for 24 hours. From jperez at snf.stanford.edu Thu Jul 18 13:19:14 2002 From: jperez at snf.stanford.edu (Jeannie Perez) Date: Thu, 18 Jul 2002 13:19:14 -0700 Subject: DO NOT Run Nitride processes on STS PECVD Message-ID: <3D3722C2.41F9FACA@snf.stanford.edu> All Users, The Ammonia MFC has been sent out for calibration. Please check Coral for further information. Jeannie Perez Stanford Nanofabrication Facility CIS Room 146, Mail Code 4070 Stanford, CA 94305 (650) 723-7997 jperez at snf.stanford.edu From jperez at snf.stanford.edu Thu Jul 18 15:31:21 2002 From: jperez at snf.stanford.edu (Jeannie Perez) Date: Thu, 18 Jul 2002 15:31:21 -0700 Subject: STS Issues Message-ID: <3D3741B9.2857AC07@snf.stanford.edu> All Users, Someone has removed the ceramic spacers from the STS. This may cause an uniformity issue. Currently we are cleaning the Chamber and after clean only oxides may be ran. If you experience a problem, please contact Jim Hayden. Regards, Jeannie From scaccag at stanford.edu Tue Jul 23 13:29:56 2002 From: scaccag at stanford.edu (Luigi Scaccabarozzi) Date: Tue, 23 Jul 2002 13:29:56 -0700 (PDT) Subject: reservation today cancelled Message-ID: I'm sorry but I cannot use my sts reservation from 3pm to 5pm. Gigi