STS Issues

Jeannie Perez jperez at snf.stanford.edu
Thu Jul 18 15:31:21 PDT 2002


All Users,

Someone has removed the ceramic spacers from the STS. This may cause an
uniformity issue. Currently we are cleaning the Chamber and after clean
only oxides may be ran. If you experience a problem, please contact Jim
Hayden.

Regards,
Jeannie




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