From dtchang at sunray.snffab.stanford.edu  Fri Mar  8 14:04:14 2002
From: dtchang at sunray.snffab.stanford.edu (David Chang)
Date: Fri, 8 Mar 2002 14:04:14 -0800 (PST)
Subject: STS FREE
Message-ID: <Pine.SOL.3.96.1020308140254.27361A-100000@sunray.snffab.stanford.edu>

Hi,

I finished an hour early.  The sts is free till 15:00.  I will used the
other two reserved slots I have.

Thanks,

David.



From jperez at snf.stanford.edu  Tue Mar 12 16:12:25 2002
From: jperez at snf.stanford.edu (Jeannie Perez)
Date: Tue, 12 Mar 2002 16:12:25 -0800
Subject: STS RED VELCRO ARM BANDS
Message-ID: <3C8E9968.AB77EBEB@snf.stanford.edu>

Hello Everyone,

In the supply Bin A 15 for the STS PECVD, I have added 3 RED Velcro
straps.
Recently we've had  smock sleeves melt while wiping the inside of
the lid or removing wafers. These straps are to be used to pull the
excess material back.  Strap one of the red velcro bands around the arm
and pull the excess material so that it doesn't hang loose.

Please try to get accustom to using them when necessary. This will save
smocks and possibly help from going down for an etch back clean.

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/sts/attachments/20020312/9f7fb5d3/attachment.html>

From yjlin at stanford.edu  Thu Mar 14 12:03:55 2002
From: yjlin at stanford.edu (Yu-Ju Lin)
Date: Thu, 14 Mar 2002 12:03:55 -0800 (PST)
Subject: Etching SiN with gold underneath
Message-ID: <Pine.LNX.4.33.0203141144350.25668-100000@cardinal5.Stanford.EDU>

Hi all,

I am looking for a recipe to etch 1um SiN with Au underneath.

I tried to dry etch SiN with O2 and CF4 plasma, but after the etching was
done, I had difficulty in wirebonding and adhering metal to the Au
surface.

So I wonder has anybody done SiN etch and still had a good Au surface?
(either dry or wet etch)

Thanks for the informations!


Yu-ju






From yjlin at stanford.edu  Thu Mar 28 16:42:01 2002
From: yjlin at stanford.edu (Yu-Ju Lin)
Date: Thu, 28 Mar 2002 16:42:01 -0800 (PST)
Subject: Surface quality of 4um SiN 
Message-ID: <Pine.LNX.4.33.0203281641270.30229-100000@cardinal5.Stanford.EDU>

Hi all,

I plan to do a 4um SiN film deposition, but I would like to know whether
the surface could get dirty(say flakes coming off). Previously I only did
1um SiN, so I just wonder whether a 4um film is still nice and clean.

Thanks for the information,

Yu-ju