Etching SiN with gold underneath

Yu-Ju Lin yjlin at stanford.edu
Thu Mar 14 12:03:55 PST 2002


Hi all,

I am looking for a recipe to etch 1um SiN with Au underneath.

I tried to dry etch SiN with O2 and CF4 plasma, but after the etching was
done, I had difficulty in wirebonding and adhering metal to the Au
surface.

So I wonder has anybody done SiN etch and still had a good Au surface?
(either dry or wet etch)

Thanks for the informations!


Yu-ju







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