Surface quality of 4um SiN

Yu-Ju Lin yjlin at
Thu Mar 28 16:42:01 PST 2002

Hi all,

I plan to do a 4um SiN film deposition, but I would like to know whether
the surface could get dirty(say flakes coming off). Previously I only did
1um SiN, so I just wonder whether a 4um film is still nice and clean.

Thanks for the information,


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