From mdickey at snf.stanford.edu  Wed Sep  4 14:43:59 2002
From: mdickey at snf.stanford.edu (Mike Dickey)
Date: Wed, 04 Sep 2002 14:43:59 -0700
Subject: Bottle change
Message-ID: <3D767E9F.EC96E88@snf.stanford.edu>

Tomorrow morning the 2% Silane/N2 gas bottle will be changed. The tool
will be on shutdown for 24 hour leak test.



From mdickey at snf.stanford.edu  Fri Sep  6 07:53:36 2002
From: mdickey at snf.stanford.edu (Mike Dickey)
Date: Fri, 06 Sep 2002 07:53:36 -0700
Subject: test
Message-ID: <3D78C170.CF8203F6@snf.stanford.edu>

System needs test after cylinder change. 24 hour leak check was good.