From jperez at snf.stanford.edu  Fri Apr 18 15:07:02 2003
From: jperez at snf.stanford.edu (Jeannie Perez)
Date: Fri, 18 Apr 2003 15:07:02 -0700
Subject: STS PECVD Temporary Nitride Recipe with good RI
Message-ID: <3EA07706.99BFB4B2@snf.stanford.edu>

I have attached  a temporary recipe you may copy from by the key broad,
until we find the cause why the refractive index changed and deposition
rate dropped.  The recipe name is   "tempnit".

Jeannie
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