STS PECVD Temporary Nitride Recipe with good RI

Jeannie Perez jperez at snf.stanford.edu
Fri Apr 18 15:07:02 PDT 2003


I have attached  a temporary recipe you may copy from by the key broad,
until we find the cause why the refractive index changed and deposition
rate dropped.  The recipe name is   "tempnit".

Jeannie
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/sts/attachments/20030418/96dba600/attachment.html>


More information about the sts mailing list