From rfasch at stanford.edu Wed Jun 25 14:23:50 2003 From: rfasch at stanford.edu (Rainer Fasching) Date: Wed, 25 Jun 2003 14:23:50 -0700 Subject: canceld reservation on thursday form 10-14 Message-ID: <008e01c33b60$12263960$f47640ab@stanford.edu> I could finish my job today. Rainer ------------------------------------------------------ Rainer Fasching, PhD Research Associate Rapid Prototyping Lab Stanford University Building 530, Room 226 Stanford, CA 94305 (650) 723-1301 Fax: (650) 723-5034 rfasch at stanford.edu ------------------------------------------------------- -------------- next part -------------- An HTML attachment was scrubbed... URL: From jperez at snf.stanford.edu Wed Jun 25 16:08:54 2003 From: jperez at snf.stanford.edu (Jeannie Perez) Date: Wed, 25 Jun 2003 16:08:54 -0700 Subject: STS PECVD down for 24 hours, starting 6/26 8:30 AM Message-ID: <3EFA2B86.79FB5D3C@snf.stanford.edu> STSdep users, I am afraid there has been a lot of 2%SiH4/N2 consumption in the STSdep over last week. We need to change the silane cylinder tomorrow, Thursday, June 26. The tool will not be available for processes using 2%SiH4/N2 after 0830 until 0800 on Friday (24 hour leak check). Sorry to have to bump you, but I cannot insure uninterrupted gas supply without changing the gas cylinder at this time. Sorry for the inconvenience, Dick -- Jeannie Perez Stanford Nanofabrication Facility CIS Room 146, Mail Code 4070 Stanford, CA 94305 (650) 723-7997 jperez at snf.stanford.edu