From cm_richter at att.net Wed Nov 5 09:51:54 2003 From: cm_richter at att.net (cm_richter at att.net) Date: Wed, 05 Nov 2003 17:51:54 +0000 Subject: sts deposition tool available today from 12:30pm to 4:30pm Message-ID: <110520031751.23097.26b@att.net> I completed my work earlier so I will not be using my afternoon reservation. Claudia From mdickey at snf.stanford.edu Thu Nov 13 08:52:21 2003 From: mdickey at snf.stanford.edu (Mike Dickey) Date: Thu, 13 Nov 2003 08:52:21 -0800 Subject: Bottle change Message-ID: <3FB3B6C5.CC0C905F@snf.stanford.edu> The STS DEP tool will be down for a gas bottle change on monday thru tuesday morning. From mdickey at snf.stanford.edu Fri Nov 14 08:55:17 2003 From: mdickey at snf.stanford.edu (Mike Dickey) Date: Fri, 14 Nov 2003 08:55:17 -0800 Subject: 2%Silane/N2 Message-ID: <3FB508F5.233071FA@snf.stanford.edu> This message is being sent to let all potential users of the STS Deposition tool to be aware that the amount of 2%Silane/N2 is running low. It is currently about 460 p.s.i. All users will need to monitor and keep an eye on their useage of this gas and be aware it may run out. The scheduled change of the bottle is monday morning. Please be advised and plan accordingly. From mdickey at snf.stanford.edu Fri Nov 14 13:26:31 2003 From: mdickey at snf.stanford.edu (Mike Dickey) Date: Fri, 14 Nov 2003 13:26:31 -0800 Subject: Calculations Message-ID: <3FB54886.3773D996@snf.stanford.edu> Here are the gas useage calculations for the STS DEP tool using 2%Silane/N2. Using the Nitride recipe at 2000 sccm's a minute..............11.86 hours (712 minutes) Using the Oxide recipe at 400 sccm's a minute.............59.4 hours ( 3564 minutes) At 1:00 p.m. on friday 11/14/03 there is 450 p.s.i. in the bottle (22.4%) This is what is left in the bottle at the current time. From mdickey at snf.stanford.edu Fri Nov 14 14:12:35 2003 From: mdickey at snf.stanford.edu (Mike Dickey) Date: Fri, 14 Nov 2003 14:12:35 -0800 Subject: Gas usage on STS Message-ID: <3FB55353.FC2401B@snf.stanford.edu> We have revised our gas useage calculation on STS DEP to include a 10% buffer. At 2 litres a minute (2000sccm) there is 400 minutes left. (Nitride) At 400 sccm's a minute there is 2000 minutes left. From thaniff at keyotee.com Tue Nov 18 11:01:41 2003 From: thaniff at keyotee.com (thaniff at keyotee.com) Date: 18 Nov 2003 19:01:41 -0000 Subject: Done early-STS Message-ID: <20031118190141.29172.qmail@ns6.webmasters.com> 2 hours left from 11:00-13:00 today. Feel free to use it. From pnataraj at snf.stanford.edu Tue Nov 18 11:16:48 2003 From: pnataraj at snf.stanford.edu (Pradeep Nataraj) Date: Tue, 18 Nov 2003 11:16:48 -0800 (PST) Subject: STS oxide dep calibration Message-ID: I tested the oxide run on newly changed Silane on STS. It runs good. pnataraj From smalekos at unr.nevada.edu Wed Nov 19 11:39:17 2003 From: smalekos at unr.nevada.edu (smalekos at unr.nevada.edu) Date: Wed, 19 Nov 2003 11:39:17 -0800 Subject: STS is now available Message-ID: <1069270757.3fbbc6e56d547@webmail.scsr.nevada.edu> We finished training and wafers early, so it is available until 1:00. ~Steven From cm_richter at att.net Wed Nov 19 19:16:03 2003 From: cm_richter at att.net (cm_richter at att.net) Date: Thu, 20 Nov 2003 03:16:03 +0000 Subject: Thursday reservation 9:30am to 2:00pm free Message-ID: <112020030316.24323.4f4b@att.net> done early....I will not need tomorrow morning's reservation. Claudia From curlwang at stanford.edu Thu Nov 20 14:08:46 2003 From: curlwang at stanford.edu (Ke Wang) Date: Thu, 20 Nov 2003 14:08:46 -0800 (PST) Subject: STS free now Message-ID: STS depo free from now to 4. sorry for short notice. _____________________________________________ Ke Wang PHD Candidate Department of Applied Physics, Stanford University CISX B113-14 Stanford, CA 94305-4070 Phone: (650)723-8040