2%Silane/N2

Mike Dickey mdickey at snf.stanford.edu
Fri Nov 14 08:55:17 PST 2003


This message is being sent to let all potential users of the STS
Deposition tool to be aware that the amount of 2%Silane/N2 is running
low. It is currently about 460 p.s.i.
All users will need to monitor and keep an eye on their useage of this
gas and be aware it may run out. The scheduled change of the bottle is
monday morning. Please be advised and plan accordingly.




More information about the sts mailing list