Calculations

Mike Dickey mdickey at snf.stanford.edu
Fri Nov 14 13:26:31 PST 2003


Here are the gas useage calculations for the STS DEP tool using
2%Silane/N2.

Using the Nitride recipe at 2000 sccm's a minute..............11.86
hours (712 minutes)
Using the Oxide recipe at 400 sccm's a minute.............59.4 hours (
3564 minutes)

At 1:00 p.m. on friday 11/14/03 there is 450 p.s.i. in the bottle
(22.4%)

This is what is left in the bottle at the current time.




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