Gas usage on STS

Mike Dickey mdickey at snf.stanford.edu
Fri Nov 14 14:12:35 PST 2003


We have revised our gas useage calculation on STS DEP to include a 10%
buffer.

At 2 litres a minute (2000sccm) there is 400 minutes left. (Nitride)

At 400 sccm's a minute there is 2000 minutes left.




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