Gas usage on STS

Mike Dickey mdickey at
Fri Nov 14 14:12:35 PST 2003

We have revised our gas useage calculation on STS DEP to include a 10%

At 2 litres a minute (2000sccm) there is 400 minutes left. (Nitride)

At 400 sccm's a minute there is 2000 minutes left.

More information about the sts mailing list