From levi at snowmass.stanford.edu Tue Jul 6 22:27:18 2004 From: levi at snowmass.stanford.edu (Ofer Levi) Date: Tue, 06 Jul 2004 22:27:18 -0700 Subject: STS PECVD is down Message-ID: <5.1.0.14.2.20040706221708.04d4bcd0@snow.stanford.edu> An HTML attachment was scrubbed... URL: From mcvittie at snf.stanford.edu Wed Jul 7 08:40:31 2004 From: mcvittie at snf.stanford.edu (Jim McVittie) Date: Wed, 07 Jul 2004 08:40:31 -0700 Subject: STS PECVD is down References: <5.1.0.14.2.20040706221708.04d4bcd0@snow.stanford.edu> Message-ID: <40EC196F.A2CB9EA1@snf.stanford.edu> Hi, I am not that familiar with this tool. It looks like the zero is way off on the SiH4 MFC. In particular, during the purge cycle the flow initially goes up to 1000sccm and then quickly comes down to just below 30 sccm. At that point it shows lot fluctuations as its average value slowly goes down to maybe as low as 24. It starts the next purge step when the fluctuations goes below 18 or so. It appears to me that the true zero is near 28. Jim Ofer Levi wrote: > Hi all, > The PECVD was down this evening. The system is now at Standby mode, > after we were booting the computer again and were running a purge > cycle but you may run into the same problem of you will try to run a > process before this issue will be checked. > Please see note about it by Jay Gantz. It had problems in purging the > gas lines, after he finished a clean cycle, and tried to deposit a > 0.25 micron overcoat of Silicon Nitride on the chamber. > From an inspection Jim McVittie did to the machine and the purge cycle > he suggested that it may be that the Silane purge step is taking very > long time every time the cycle is activated at the end of a deposition > run, and there may be some problems with that line flow calibration. > He did not observe any other purge related problems, but last week the > N2 gas line seem to not reach the desired pressure while purging, and > manual intervention was needed to continue the process and unload the > samples. Jeannie suggested that the manual flow meter for the N2 line > may cause some of these problems. > > Regards, > Ofer > > > ______________________________________________ > > Ofer Levi, Ph.D. > Department of Electrical Engineering, Stanford University > CIS-X Rm 310, Stanford, CA 94305-4075 > > Phone: (650)723-0464 or 725-6907 > Fax: (650)723-4659 > Adm. Asst.: Gail Chun-Creech Ph: (650)723-0983 > E-Mail: levi at snow.stanford.edu > Web page: http://snow.stanford.edu/~levi/ > ______________________________________________ -------------- next part -------------- A non-text attachment was scrubbed... Name: mcvittie.vcf Type: text/x-vcard Size: 422 bytes Desc: Card for Jim McVittie URL: From l.boman at gemfire.com Wed Jul 7 08:59:40 2004 From: l.boman at gemfire.com (Lee Boman) Date: Wed, 7 Jul 2004 08:59:40 -0700 Subject: STS PECVD is down Message-ID: <0CFB8E96685BD611B7A800065B04BB2CF64721@arnold> Jim, I ran the system last Thursday and noticed the purge cycle took around 20-30 min but when the line was pumped out the system functioned properly (if you abort the purge it would just start back up at the purge process as soon as you tried to run it again). It appears that after each SiNx run the system pumps the Ammonia and Silane line out. If the pressure behind the mfc is high I could see that this could take a long time. The purge program seems to fully open the mfc for a few seconds then shuts it off to pump and prevent too much Silane from being exhausted at once. It repeats this cycle until the gas line is empty. I wonder if the Silane bottle has been changed lately or that for some reason there is higher pressure behind the Silane line that just takes the purge/pump process much longer to get through. Lee -----Original Message----- From: Jim McVittie [mailto:mcvittie at snf.stanford.edu] Sent: Wednesday, July 07, 2004 8:41 AM To: Ofer Levi Cc: sts at snf.stanford.edu Subject: Re: STS PECVD is down Hi, I am not that familiar with this tool. It looks like the zero is way off on the SiH4 MFC. In particular, during the purge cycle the flow initially goes up to 1000sccm and then quickly comes down to just below 30 sccm. At that point it shows lot fluctuations as its average value slowly goes down to maybe as low as 24. It starts the next purge step when the fluctuations goes below 18 or so. It appears to me that the true zero is near 28. Jim Ofer Levi wrote: > Hi all, > The PECVD was down this evening. The system is now at Standby mode, > after we were booting the computer again and were running a purge > cycle but you may run into the same problem of you will try to run a > process before this issue will be checked. > Please see note about it by Jay Gantz. It had problems in purging the > gas lines, after he finished a clean cycle, and tried to deposit a > 0.25 micron overcoat of Silicon Nitride on the chamber. > From an inspection Jim McVittie did to the machine and the purge cycle > he suggested that it may be that the Silane purge step is taking very > long time every time the cycle is activated at the end of a deposition > run, and there may be some problems with that line flow calibration. > He did not observe any other purge related problems, but last week the > N2 gas line seem to not reach the desired pressure while purging, and > manual intervention was needed to continue the process and unload the > samples. Jeannie suggested that the manual flow meter for the N2 line > may cause some of these problems. > > Regards, > Ofer > > > ______________________________________________ > > Ofer Levi, Ph.D. > Department of Electrical Engineering, Stanford University > CIS-X Rm 310, Stanford, CA 94305-4075 > > Phone: (650)723-0464 or 725-6907 > Fax: (650)723-4659 > Adm. Asst.: Gail Chun-Creech Ph: (650)723-0983 > E-Mail: levi at snow.stanford.edu > Web page: http://snow.stanford.edu/~levi/ > ______________________________________________ From jperez at snf.stanford.edu Fri Jul 9 13:20:06 2004 From: jperez at snf.stanford.edu (Jeannie Perez) Date: Fri, 09 Jul 2004 13:20:06 -0700 Subject: STS PECVD silane purge cycle Message-ID: <40EEFDF6.7854CA56@snf.stanford.edu> All STS PECVD Users, The Silane purge cycle is extremely longer today. Jim Haydon will work on the N2 purge valve and Silane MFC next week. You can still run your process using this gas, but you'll have to wait for the Silane purge to end. Some users are experiencing 45 minutes purging of the Silane line. Aborting the purge cycle won't help because it'll start the purge cycle from the beginning at the next step. I ran a short oxide recipe test and it took no more than twelve minutes to purge. Pass down any information pertaining to the long purge cycle that would help Jim Haydon resolve this problem. Plan on additional time at STS PECVD if you want to use it this weekend. Thanks for your patience, jeannie perez From nburt at ksu.edu Tue Jul 27 10:25:17 2004 From: nburt at ksu.edu (Nathaniel Burt) Date: Tue, 27 Jul 2004 12:25:17 -0500 Subject: STS PECVD available 2-4:30pm today (Tues) Message-ID: <410ECFBC@webmail.ksu.edu> I've removed my STS PECVD reservation for 2-4:30pm today (Tuesday) because my samples won't be ready. My apologies for the late notice. Nathaniel Burt