From levi at snowmass.stanford.edu Sun Jun 13 21:14:43 2004 From: levi at snowmass.stanford.edu (Ofer Levi) Date: Sun, 13 Jun 2004 21:14:43 -0700 Subject: Deposition of Silicon Nitride over Quartz or Glass Message-ID: <4.3.2.7.2.20040613210506.02686820@snow.stanford.edu> Hi All, I am trying to deposit a 530 nm thick and uniform layer of Silicon Nitride over Quartz using the STS PECVD tool. I would like to get some information about the uniformity and deposition rates of Silicon Nitride over Quartz, and some information about the difference from deposition over Silicon wafers. Jim McVittie told me that in his experiments few years back he found ~ 8% slower deposition rate compared with what he had over silicon (This Friday was calibrated to be ~ 70.6 Ang./minute for 2500 Ang. thick SiNx over Silicon, total chamber sidewall coating at 2.9 micron). Rafael and Mike updated me that edge effects also change rate around sample edges. Any additional information from people who have some experience with deposition over Quartz /glass wafers will be great. I also would like to gather information about the index of refraction dispersion of these thin films in wavelengths above 633 nm. Thanks, Ofer Levi ______________________________________________ Ofer Levi, Ph.D. Department of Electrical Engineering, Stanford University CIS-X Rm 310, Stanford, CA 94305-4075 Phone: (650)725-6907 or 723-0464 Fax: (650)723-4659 Adm. Asst.: Gail Chun-Creech Ph: (650)723-0983 E-Mail: levi at snow.stanford.edu Web page: http://snow.stanford.edu/~levi/ ______________________________________________ From Jay.Gantz at students.olin.edu Mon Jun 28 07:53:16 2004 From: Jay.Gantz at students.olin.edu (Jay Gantz) Date: Mon, 28 Jun 2004 10:53:16 -0400 Subject: STS use on Tuesday, June 29, 2004 Message-ID: <81F8DFD002DFF14697B4F5FE420FEB6803D193@OLINEXVS01.olin.edu> Last week my REU mentor, Eric Guyer reserved time on the STS for the 1-4 pm time slot onTuesday, June 29, 2004. He will be unable to make that time and he is unable to reach a computer to remove his name from Coral. Please be advised that the machine is availible for use during this time. If you have any questions, please feel free to email me: jay.gantz at students.olin.edu. Thank you, Jay Gantz SNF, REU Summer 2004 -------------- next part -------------- An HTML attachment was scrubbed... URL: From Jay.Gantz at students.olin.edu Tue Jun 29 10:45:16 2004 From: Jay.Gantz at students.olin.edu (Jay Gantz) Date: Tue, 29 Jun 2004 13:45:16 -0400 Subject: Done early Message-ID: <81F8DFD002DFF14697B4F5FE420FEB6803D196@OLINEXVS01.olin.edu> I am done early for my reserved time which was until 12:30. The machine just had a nitride run and is currently at 2.7 um. Jay Gantz SNF REU Program -------------- next part -------------- An HTML attachment was scrubbed... URL: