STS PECVD Nitride Recipes can be edited back
jperez at snf.stanford.edu
Fri Apr 15 14:24:59 PDT 2005
The 2% Silane gas flow for nitride recipes (2000 sccm) is stable again.
I ran a test for five minutes and the Silane flow only fluctuated .01%
of the set point. Please edited your NITRIDE RECIPES, Silane gas flows
back to 2000 sccm.
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