From rcrane at snf.stanford.edu Wed Aug 10 13:53:47 2005 From: rcrane at snf.stanford.edu (Dick Crane) Date: Wed, 10 Aug 2005 13:53:47 -0700 Subject: Tool shutdown 8/17-8/26] Message-ID: <42FA695B.5030804@snf.stanford.edu> A friendly reminder and an important change Change: The ag4108 will be down for all processes during this shutdown because the ag4100 N2 and O2 lines will be welded into the ag4108 supply lines. Fab users, STS (dep) and ag4108 disruption alert, August 17, 2005, one and a half weeks duration. The ag4108 and the STS pecvd tools will be off-line for processes requiring ammonia gas for one and a half weeks starting around August 17. I believe the one and a half weeks quoted is generous and the actual time may be less than 1 week. This schedule allows permitting and inspection activities to occur at the same time as needed for a scheduled furnace shutdown, thus minimizing overall fab downtime. Please plan ahead for your tool needs. Thank you for your patience and support, Dick Details: The NH3 gas cabinet supplies both the ag4108 and STS tools. NH3 gas lines are being extended to the ag4100 (new install) and the ALD (rebuilt spectrum2). Since the toxic and house gases are regulated by Santa Clara County Building and Environmental Departments, all work must be tested and inspected according to their timetable. We will complete as much preliminary work as possible prior to shutting down gases. -------------- next part -------------- An HTML attachment was scrubbed... URL: From rcrane at snf.stanford.edu Tue Aug 16 11:31:17 2005 From: rcrane at snf.stanford.edu (Dick Crane) Date: Tue, 16 Aug 2005 11:31:17 -0700 Subject: Ammonia is now down Message-ID: <430230F5.9080503@snf.stanford.edu> STS and ag4108 users, Concerning the below mentioned shutdown. The NH3 gas line was purged on Monday, two days ahead of schedule. NH3 is not available presently. The source was not correctly labeled which misled us in scheduling the shutdown. Sorry for any inconvenience the early shutdown has caused, Dick A friendly reminder and an important change Change: The ag4108 will be down for all processes during this shutdown because the ag4100 N2 and O2 lines will be welded into the ag4108 supply lines. Fab users, STS (dep) and ag4108 disruption alert, August 17, 2005, one and a half weeks duration. The ag4108 and the STS pecvd tools will be off-line for processes requiring ammonia gas for one and a half weeks starting around August 17. I believe the one and a half weeks quoted is generous and the actual time may be less than 1 week. This schedule allows permitting and inspection activities to occur at the same time as needed for a scheduled furnace shutdown, thus minimizing overall fab downtime. Please plan ahead for your tool needs. Thank you for your patience and support, Dick Details: The NH3 gas cabinet supplies both the ag4108 and STS tools. NH3 gas lines are being extended to the ag4100 (new install) and the ALD (rebuilt spectrum2). Since the toxic and house gases are regulated by Santa Clara County Building and Environmental Departments, all work must be tested and inspected according to their timetable. We will complete as much preliminary work as possible prior to shutting down gases. -------------- next part -------------- An HTML attachment was scrubbed... URL: From jperez at snf.stanford.edu Wed Aug 31 15:14:57 2005 From: jperez at snf.stanford.edu (Jeannie Perez) Date: Wed, 31 Aug 2005 15:14:57 -0700 Subject: The ammonia line is back on for Nitride depositions - STS PECVD Message-ID: <43162BE1.6090907@snf.stanford.edu> Test ran was Good. Thickness average 941 A, Index of refraction was 2.03. Delta slightly high <5% across the wafer.