From rcrane at snf.stanford.edu Tue Jul 26 11:43:19 2005 From: rcrane at snf.stanford.edu (Dick Crane) Date: Tue, 26 Jul 2005 11:43:19 -0700 Subject: Tool shutdown 8/17-8/26 Message-ID: <42E68447.2090906@snf.stanford.edu> Fab users, STS (dep) and ag4108 disruption alert, August 17, 2005, one and a half weeks duration. The ag4108 and the STS pecvd tools will be off-line for processes requiring ammonia gas for one and a half weeks starting around August 17. I believe the one and a half weeks quoted is generous and the actual time may be less than 1 week. This schedule allows permitting and inspection activities to occur at the same time as needed for a scheduled furnace shutdown, thus minimizing overall fab downtime. Please plan ahead for your tool needs. Thank you for your patience and support, Dick Details: The NH3 gas cabinet supplies both the ag4108 and STS tools. NH3 gas lines are being extended to the ag4100 (new install) and the ALD (rebuilt spectrum2). Since the toxic and house gases are regulated by Santa Clara County Building and Environmental Departments, all work must be tested and inspected according to their timetable. We will complete as much preliminary work as possible prior to shutting down gases. -------------- next part -------------- An HTML attachment was scrubbed... URL: