From jhaydon at snf.stanford.edu Mon Oct 3 16:13:28 2005 From: jhaydon at snf.stanford.edu (james haydon) Date: Mon, 03 Oct 2005 16:13:28 -0700 Subject: STS status Message-ID: <4341BB18.9060703@snf.stanford.edu> The STS is currently working after changing the main line filter. Time will tell if this was the only problem. I could not find any problems with the MFC's. Jim H From aeonia at stanford.edu Mon Oct 10 23:11:32 2005 From: aeonia at stanford.edu (Hyeun-su Kim) Date: Mon, 10 Oct 2005 23:11:32 -0700 Subject: sts is free from now to 2am Message-ID: <1129011092.434b57949574d@webmail> sts is free from now to 2am. From ankurjn at stanford.edu Thu Oct 13 15:25:51 2005 From: ankurjn at stanford.edu (Ankur Jain) Date: Thu, 13 Oct 2005 15:25:51 -0700 Subject: Looking for a PECVD oxide sample - any size/thickness Message-ID: <1129242351.434edeef44584@webmail.stanford.edu> Hello everyone, I am looking for a sample that has a PECVD oxide layer on top. Any thickness will do, though around 0.5 um would be best. Any substrate would do. Any shape/size of the sample is OK. The only requirement is to have a PECVD oxide layer on top. Please let me know if you could help. I would truly appreciate it. thanks, Ankur. From jperez at snf.stanford.edu Fri Oct 21 09:41:28 2005 From: jperez at snf.stanford.edu (Jeannie Perez) Date: Fri, 21 Oct 2005 09:41:28 -0700 Subject: STS PECVD Going down for 2% SILANE bottle change at 2:30 PM today! Message-ID: <43591A38.20609@snf.stanford.edu> STS PECVD will be down for the week-end, up on Monday! From jperez at snf.stanford.edu Tue Oct 25 15:27:47 2005 From: jperez at snf.stanford.edu (Jeannie Perez) Date: Tue, 25 Oct 2005 15:27:47 -0700 Subject: STS PECVD is up! Message-ID: <435EB163.516F5914@snf.stanford.edu> The STS PECVD is in the clean cycle (oxpredep). After the clean cycle is finish run a oxide or nitride test (~1000A). Log thickness, dep. rate and refractive index. If measurements are good the tool is ready to use. Regards, -- Jeannie Perez Science and Engineering Technician Stanford Nanofabrication Facility Stanford University Tel: (650) 723-7997 Fax: (650) 725-6278 -------------- next part -------------- An HTML attachment was scrubbed... URL: From zhangy at stanford.edu Thu Oct 27 11:28:59 2005 From: zhangy at stanford.edu (Yuan Zhang) Date: Thu, 27 Oct 2005 11:28:59 -0700 Subject: sts PECVD is free till 12:30pm Message-ID: <1130437739.43611c6ba3237@webmail.stanford.edu> Finish early. Yuan Zhang EE department