From uyoon at stanford.edu  Thu Sep 21 15:38:33 2006
From: uyoon at stanford.edu (Uija Yoon)
Date: Thu, 21 Sep 2006 15:38:33 -0700
Subject: STS PECVD DEP
Message-ID: <004401c6ddce$ab58e8d0$0100000a@Mimie>

STS is in clean and will need two test: oxide and nitride with 
1000 A each. Test wafers are on the table.
Jeannie
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From jonroth at stanford.edu  Thu Sep 21 15:47:45 2006
From: jonroth at stanford.edu (Jonathan Edgar Roth)
Date: Thu, 21 Sep 2006 15:47:45 -0700
Subject: STS PECVD DEP
In-Reply-To: <004401c6ddce$ab58e8d0$0100000a@Mimie>
References: <004401c6ddce$ab58e8d0$0100000a@Mimie>
Message-ID: <1158878865.451316911a5af@webmail.stanford.edu>

Quoting Uija Yoon <uyoon at stanford.edu>:

> STS is in clean and will need two test: oxide and nitride with
> 1000 A each. Test wafers are on the table.
> Jeannie


Are you stating it's the next user's responsibility to do these test wafers?
 Must this take priority over our own work?  What recipe to follow and what
tests to perform?

JR