STS PECVD DEP

Jonathan Edgar Roth jonroth at stanford.edu
Thu Sep 21 15:47:45 PDT 2006


Quoting Uija Yoon <uyoon at stanford.edu>:

> STS is in clean and will need two test: oxide and nitride with
> 1000 A each. Test wafers are on the table.
> Jeannie


Are you stating it's the next user's responsibility to do these test wafers?
 Must this take priority over our own work?  What recipe to follow and what
tests to perform?

JR



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