From jperez at snf.stanford.edu Wed Aug 1 15:33:18 2007 From: jperez at snf.stanford.edu (Jeannie Perez) Date: Wed, 01 Aug 2007 15:33:18 -0700 Subject: Test wafers available for STS PECVD Message-ID: <6.2.5.6.2.20070801152945.01e28ad0@snf.stanford.edu> STS PECVD may come up. If system comes up it will need a clean before we can test the system. I have four test wafers on top of STS to use for testing. Once clean you may use a test wafer to test low / high frequency oxide and Nitride. Thanks, Jeannie Perez Science and Engineering Technician Stanford Nanofabrication Facility Stanford University Tel: (650) 723-7997 Fax: (650) 725-6278 From mrjpark at stanford.edu Fri Aug 3 18:41:27 2007 From: mrjpark at stanford.edu (Joong Sun Park) Date: Fri, 3 Aug 2007 18:41:27 -0700 Subject: STS free till 9pm Message-ID: Done early Joongsun From fmadriz at scu.edu Wed Aug 8 23:56:24 2007 From: fmadriz at scu.edu (Francisco Madriz) Date: Wed, 08 Aug 2007 23:56:24 -0700 Subject: Seeking for help. Message-ID: <46BA5830020000F60002B740@gwia1.scu.edu> I need to deposit a high conductivity metal between Si and SiO2. The metal must not oxidized when submitted under STS and it must adhere well to SiO2. Do any body have a suggestion? I appreciate your help. Thanks. Frank Madriz From huangzb at stanford.edu Tue Aug 14 01:20:39 2007 From: huangzb at stanford.edu (Zubin Huang) Date: Tue, 14 Aug 2007 01:20:39 -0700 Subject: reservation release from 10am to 4pm Tuesday Message-ID: <095e01c7de4b$ff777200$d97640ab@RPLZubin> Sorry for the late notice. Best, Zubin -------------- next part -------------- An HTML attachment was scrubbed... URL: