Test wafers available for STS PECVD
jperez at snf.stanford.edu
Wed Aug 1 15:33:18 PDT 2007
STS PECVD may come up. If system comes up it will need a clean before
we can test the system.
I have four test wafers on top of STS to use for testing. Once clean
you may use a test wafer to test low / high frequency oxide and Nitride.
Science and Engineering Technician
Stanford Nanofabrication Facility
Tel: (650) 723-7997
Fax: (650) 725-6278
More information about the sts