Test wafers available for STS PECVD

Jeannie Perez jperez at snf.stanford.edu
Wed Aug 1 15:33:18 PDT 2007

STS PECVD may come up. If system comes up it will need a clean before 
we can test the system.
I have four test wafers on top of STS to use for testing. Once clean 
you may use a test wafer to test low / high frequency oxide and Nitride.

Jeannie Perez
Science and Engineering Technician
Stanford Nanofabrication Facility
Stanford University
Tel: (650) 723-7997
Fax: (650) 725-6278

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