From jperez at snf.stanford.edu  Mon Feb 26 09:51:54 2007
From: jperez at snf.stanford.edu (Jeannie Perez)
Date: Mon, 26 Feb 2007 09:51:54 -0800
Subject: STS PECVD Hard drive
Message-ID: <6.2.5.6.2.20070226093417.01d4eaf8@snf.stanford.edu>

Hello Everyone,
The hard drive has been failing and we are afraid that someone's 
wafers may be in the middle of processing when it happens again.  The 
STS PECVD  will be down until we get another hard drive and processes 
transferred over. At this time we've ran into a problem switching 
information over and the tool may be down for awhile. I'll up date 
you with another email if it isn't up by this weekend.
Regards,

Jeannie Perez
Science and Engineering Technician
Stanford Nanofabrication Facility
Stanford University
Tel: (650) 723-7997
Fax: (650) 725-6278




From jperez at snf.stanford.edu  Tue Feb 27 15:40:52 2007
From: jperez at snf.stanford.edu (Jeannie Perez)
Date: Tue, 27 Feb 2007 15:40:52 -0800
Subject: STS PECVD is up, Please read Coral for up date!
Message-ID: <6.2.5.6.2.20070227154008.01d6cd10@snf.stanford.edu>



Jeannie Perez
Science and Engineering Technician
Stanford Nanofabrication Facility
Stanford University
Tel: (650) 723-7997
Fax: (650) 725-6278