STS PECVD Hard drive

Jeannie Perez jperez at
Mon Feb 26 09:51:54 PST 2007

Hello Everyone,
The hard drive has been failing and we are afraid that someone's 
wafers may be in the middle of processing when it happens again.  The 
STS PECVD  will be down until we get another hard drive and processes 
transferred over. At this time we've ran into a problem switching 
information over and the tool may be down for awhile. I'll up date 
you with another email if it isn't up by this weekend.

Jeannie Perez
Science and Engineering Technician
Stanford Nanofabrication Facility
Stanford University
Tel: (650) 723-7997
Fax: (650) 725-6278

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