From jperez at snf.stanford.edu Tue Jul 10 16:43:45 2007 From: jperez at snf.stanford.edu (Jeannie Perez) Date: Tue, 10 Jul 2007 16:43:45 -0700 Subject: STS is up Message-ID: <6.2.5.6.2.20070710164240.057a58f8@snf.stanford.edu> STS PECVD is up and ready for a Nitride test. Please remember to coat the chamber first. I've tested the high frequency oxide recipes and it was good. See log sheet for data information. Low frequency test was bad. Uniformity across the wafer was greater than 12%. Thanks for your patience, Jeannie Perez Science and Engineering Technician Stanford Nanofabrication Facility Stanford University Tel: (650) 723-7997 Fax: (650) 725-6278 From candacec at stanford.edu Thu Jul 12 09:51:04 2007 From: candacec at stanford.edu (Candace Kay Chan) Date: Thu, 12 Jul 2007 09:51:04 -0700 Subject: STS free today 1-4 pm Message-ID: <20070712095104.h3awnkr0eeg4skcc@webmail.stanford.edu> Got sick and have a doctor's appt 2:15 -- Candace Kay Chan Stanford University From cm_richter at att.net Tue Jul 17 07:10:11 2007 From: cm_richter at att.net (Claudia Richter) Date: Tue, 17 Jul 2007 14:10:11 +0000 Subject: STS: Cancelled Reservation from 1pm-4:30pm (Today) Message-ID: <071720071410.1551.469CCDC2000D7A0C0000060F21603763169D0A9B080C079DA1030C@att.net> I will not be able to make it in time to use this reservation. Sorry for the late notice. Claudia From atomada at stanford.edu Tue Jul 17 15:10:49 2007 From: atomada at stanford.edu (atomada at stanford.edu) Date: Tue, 17 Jul 2007 15:10:49 -0700 Subject: Finished early STS free at 3:10pm to 5pm In-Reply-To: <071720071410.1551.469CCDC2000D7A0C0000060F21603763169D0A9B080C079DA1030C@att.net> References: <071720071410.1551.469CCDC2000D7A0C0000060F21603763169D0A9B080C079DA1030C@att.net> Message-ID: <20070717151049.ssbmxhebj0n5kwgk@webmail.stanford.edu> From cm_richter at att.net Wed Jul 18 19:26:06 2007 From: cm_richter at att.net (Claudia Richter) Date: Thu, 19 Jul 2007 02:26:06 +0000 Subject: Cancelled Reservation: Thursday 9am to 1pm Message-ID: <071920070226.29906.469ECBBE00085020000074D221602807489D0A9B080C079DA1030C@att.net> I was able to get to finish up early. Claudia From jperez at snf.stanford.edu Mon Jul 23 14:08:41 2007 From: jperez at snf.stanford.edu (Jeannie Perez) Date: Mon, 23 Jul 2007 14:08:41 -0700 Subject: Do NOT Run Nitride recipes Message-ID: <6.2.5.6.2.20070723140045.01de6ce0@snf.stanford.edu> Hi Everyone, There seems to be fluctuating reflective power problems with Nitride recipes.(from high frequency). Jim Haydon will check and make sure wires or connections haven't come off. I checked two standard nitride recipes and they both are having the same problem. I checked a high frequency recipe (oxide) and didn't see a problem. Regards, Jeannie Perez Science and Engineering Technician Stanford Nanofabrication Facility Stanford University Tel: (650) 723-7997 Fax: (650) 725-6278 From jperez at snf.stanford.edu Fri Jul 27 15:20:55 2007 From: jperez at snf.stanford.edu (Jeannie Perez) Date: Fri, 27 Jul 2007 15:20:55 -0700 Subject: STS will be down for a few weeks Message-ID: <6.2.5.6.2.20070727151534.01e4be28@snf.stanford.edu> Parts are being ordered which will take a week or two. Once Jim replaces them, we'll have to condition the chamber many times and start running tests. Sorry for any inconvenience, Jeannie Perez Science and Engineering Technician Stanford Nanofabrication Facility Stanford University Tel: (650) 723-7997 Fax: (650) 725-6278 From rohank at stanford.edu Fri Jul 27 17:20:25 2007 From: rohank at stanford.edu (Rohan D. Kekatpure) Date: Fri, 27 Jul 2007 17:20:25 -0700 Subject: STS will be down for a few weeks In-Reply-To: <6.2.5.6.2.20070727151534.01e4be28@snf.stanford.edu> References: <6.2.5.6.2.20070727151534.01e4be28@snf.stanford.edu> Message-ID: <20070727172025.3kpoymu403c0k0kc@webmail.stanford.edu> Is it possible to allow the system to run high frequency oxide till the parts arrive? thanks -Rohan ----- Message from jperez at snf.stanford.edu --------- Date: Fri, 27 Jul 2007 15:20:55 -0700 From: Jeannie Perez Reply-To: Jeannie Perez Subject: STS will be down for a few weeks To: sts at snf.stanford.edu > Parts are being ordered which will take a week or two. Once Jim > replaces them, we'll have to condition the chamber many times and start > running tests. > Sorry for any inconvenience, > > > Jeannie Perez > Science and Engineering Technician > Stanford Nanofabrication Facility > Stanford University > Tel: (650) 723-7997 > Fax: (650) 725-6278 ----- End message from jperez at snf.stanford.edu ----- From atomada at stanford.edu Tue Jul 31 12:32:20 2007 From: atomada at stanford.edu (atomada at stanford.edu) Date: Tue, 31 Jul 2007 12:32:20 -0700 Subject: finished early Message-ID: <20070731123220.wo91mttvt68skg0c@webmail.stanford.edu>